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1

Evaluation of Post Etch Residue Cleaning Solutions for the Removal of TiN Hardmask after Dry Etch of Low-k Dielectric Materials on 45 nm Pitch Interconnects

Payne, Makonnen, Lippy, Steven, Lieten, Ruben R., Kesters, Els, Le, Quoc Toan, Murdoch, Gayle, Gonzalez, Victor V., Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2016

Langue:

english

Fichier:

PDF, 3.32 MB

english, 2016

2

Post Etch Residue Removal and Material Compatibility in BEOL Using Formulated Chemistries

Kesters, Els, Le, Q.T., Yu, D., Shen, M., Braun, S., Klipp, A., Holsteyns, F.

Journal:

Solid State Phenomena

Année:

2014

Langue:

english

Fichier:

PDF, 780 KB

english, 2014

3

Influence of Photoresist and BARC Selection on the Efficiency of a Post-Etch Wet Strip in BEOL Applications

Kesters, Els, Lux, Marcel, Pittevils, Joris, Baeyens, Jonas, Vereecke, Guy, Baerts, Christina, Shamiryan, Denis, Struyf, Herbert

Journal:

Solid State Phenomena

Année:

2012

Langue:

english

Fichier:

PDF, 642 KB

english, 2012

4

Alternative Photoresist Removal Process to Minimize Damage of Low- k Material Induced by Ash Plasma

Le, Quoc Toan, Keldermans, Johan, Chiodarelli, Nicoló, Kesters, Els, Lux, Marcel, Claes, Martine, Vereecke, Guy

Journal:

Japanese Journal of Applied Physics

Année:

2008

Langue:

english

Fichier:

PDF, 218 KB

english, 2008

5

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Influence of UV Irradiation on the Removal of Post-etch Photoresist in Porous Low-k Dielectric Patterning

Kesters, Els, Le, Quoc Toan, Lux, Marcel, Onandia, Laura, Baerts, Christina, Vereecke, Guy

Année:

2009

Langue:

english

Fichier:

PDF, 421 KB

english, 2009

6

Application of UV Irradiation in Removal of Post-etch 193 nm Photoresist

Le, Quoc Toan, Kesters, Els, Prager, L, Lux, Marcel, Marsik, P, Vereecke, Guy

Journal:

MRS Proceedings

Année:

2009

Langue:

english

Fichier:

PDF, 196 KB

english, 2009

7

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - All-Wet Strip Approaches for Post-Etch Photoresist Layers After Low-K Patterning

Claes, Martine, Le, QuocToan, Kesters, Els, Lux, Marcel, Urionabarrenetxea, Ariana, Vereecke, Guy, Mertens, P., Carleer, R., Adriaensens, P.

Année:

2007

Langue:

english

Fichier:

PDF, 725 KB

english, 2007

8

One-Step Wet Clean Removal of Post-Etch Fluoropolymer Residues

Gemmill, William R., Kesters, Els, Le, Quoc Toan

Journal:

Solid State Phenomena

Année:

2012

Langue:

english

Fichier:

PDF, 594 KB

english, 2012

9

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Ion-Implant Photoresist Removal via Wet Chemical Cleans Combined with Physical Force Pretreatments

Totir, George G., Frank, Martin, Vos, Rita, Arnauts, Sophia, Bearda, Twan, Kenis, Karine, Delande, Martine, Le, QuocToan, Kesters, Els, Vereecke, Guy, Mannaert, Geert, Lux, Marcel, Hoflijk, Ilse, Cona

Année:

2007

Langue:

english

Fichier:

PDF, 854 KB

english, 2007

10

Rapid Recovery Process of Plasma Damaged Porous Low-k Dielectrics by Wet Surface Modifying Treatment

Iwasaki, Akihisa, Higuchi, Ayumi, Komori, Kana, Sato, Masanobu, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2016

Langue:

english

Fichier:

PDF, 378 KB

english, 2016

11

Identification of non-mutated neoantigens presented by TAP-deficient tumors

Marijt, Koen A., Blijleven, Laura, Verdegaal, Els M.E., Kester, Michel G., Kowalewski, Daniel J., Rammensee, Hans-Georg, Stevanović, Stefan, Heemskerk, Mirjam H.M., van der Burg, Sjoerd H., van Hall,

Journal:

Journal of Experimental Medicine

Année:

2018

Langue:

english

Fichier:

PDF, 2.38 MB

english, 2018

12

Controlled cobalt recess for advanced interconnect metallization

Pacco, Antoine, Akanishi, Yuya, Le, Quoc Toan, Kesters, Els, Murdoch, Gayle, Holsteyns, Frank

Journal:

Microelectronic Engineering

Année:

2019

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2019

13

Promiscuity of the AlloHLA-A2 Restricted T Cell Repertoire Hampers the Generation of Minor Histocompatibility Antigen-specific Cytotoxic T Cells across HLA Barriers

Liesbeth E.M. Oosten, Els Blokland, Michel G.D. Kester, J.H. Frederik Falkenburg, Astrid G.S. van Halteren, Els Goulmy

Journal:

Biology of Blood and Marrow Transplantation

Année:

2007

Langue:

english

Fichier:

PDF, 931 KB

english, 2007

14

A breast-feeding promotion and support program a randomized trial in the Netherlands

Els J. Kools, Carel Thijs, Arnold D.M. Kester, Piet A. van den Brandt, Hein de Vries

Journal:

Preventive Medicine

Année:

2005

Langue:

english

Fichier:

PDF, 820 KB

english, 2005

15

The motivational determinants of breast-feeding: Predictors for the continuation of breast-feeding

Els J. Kools, Carel Thijs, Arnold D.M. Kester, Hein de Vries

Journal:

Preventive Medicine

Année:

2006

Langue:

english

Fichier:

PDF, 336 KB

english, 2006

16

Synthesis and Characterization of Poly(pyridine vinylene) via the Sulfinyl Precursor Route

Gillissen, Stijn, Jonforsen, Maria, Kesters, Els, Johansson, Tomas, Theander, Mathias, Andersson, Mats R., Inganäs, Olle, Lutsen, Laurence, Vanderzande, Dirk

Journal:

Année:

2001

Langue:

english

Fichier:

PDF, 73 KB

english, 2001

17

Polymerization Behavior of Xanthate-Containing Monomers toward PPV Precursor Polymers: Study of the Elimination Behavior of Precursor Polymers and Oligomers with in-Situ FT-IR and UV−Vis Analytical Techniques

Kesters, Els, Gillissen, Stijn, Motmans, Filip, Lutsen, Laurence, Vanderzande, Dirk

Journal:

Année:

2002

Langue:

english

Fichier:

PDF, 170 KB

english, 2002

18

Focus Spot Reduction by Brush Scrubber Cleaning

Pacco, Antoine, Kesters, Els, Simms, Ihsan, Nafus, Kathleen, Vandereyken, Jelle, Yonekawa, Hiroki

Journal:

Solid State Phenomena

Année:

2014

Langue:

english

Fichier:

PDF, 538 KB

english, 2014

19

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - PR and BARC Wet Strip in BEOL Patterning Using a UV-Enabled Aqueous Process

Kesters, Els, Le, Quoc Toan, Lux, Marcel, Vereecke, Guy, Struyf, Herbert, De Gendt, Stefan

Année:

2011

Langue:

english

Fichier:

PDF, 693 KB

english, 2011

20

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Modifications of Porous Low-k by Plasma Treatments and Wet Cleans

Xu, Kaidong, Vereecke, Guy, Kesters, Els, Le, QuocToan, Lux, Marcel, Henry, Sally-Ann, Kraus, Harald, Archer, Leo, Mertens, P., Kovacs, Frederic, Dalmer, Michael, Gaulhofer, Ernst, Luo, Shijian, Han,

Année:

2007

Langue:

english

Fichier:

PDF, 289 KB

english, 2007

21

Wet Removal of Post-Etch Residues by a Combination of UV Irradiation and a SC1 Process

Kesters, Els, Le, Q.T., Simms, I., Nafus, K., Struyf, H., de Gendt, S.

Journal:

Solid State Phenomena

Année:

2012

Langue:

english

Fichier:

PDF, 375 KB

english, 2012

22

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Effect of Radical Scavenger and UV Irradiation on Removal of Photoresist and BARC using Water/Ozone in Cu/Low-k Interconnect

Le, Quoc Toan, Lux, Marcel, Kesters, Els, Prager, Lutz, Vereecke, Guy

Année:

2009

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2009

23

Study of Wetting of Nanostructures Using Decoration by Etching

Vereecke, Guy, Xu, Xiu Mei, Kesters, Els, Simms, Ishan, Nafus, Kathleen, Haensel, Leander, Kim, Tae Gon, Lismont, Mark, Holsteyns, Frank, De Gendt, Stefan

Journal:

Solid State Phenomena

Année:

2014

Langue:

english

Fichier:

PDF, 969 KB

english, 2014

24

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Extreme Ultraviolet (EUV) Lithography II - Influence of environments on the footprint of particle contamination on EUV mask

Kim, Tae-Gon, La Fontaine, Bruno M., Naulleau, Patrick P., Kesters, Els, Struyf, Herbert, Mertens, Paul W., De Gendt, Stefan, Heyns, Marc

Année:

2011

Langue:

english

Fichier:

PDF, 5.08 MB

english, 2011

25

Characterization of Etch Residues Generated on Damascene Structures

Le, Quoc Toan, Kesters, Els, Hoflijk, I., Conard, T., Shen, M., Braun, S., Burk, Y., Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2016

Langue:

english

Fichier:

PDF, 394 KB

english, 2016

26

Impact of Dissolved Oxygen in Dilute HF Solution on Material Etch

Kesters, Els, Iwasaki, Akihisa, Le, Quoc Toan, Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2016

Langue:

english

Fichier:

PDF, 829 KB

english, 2016

27

Study of Copper Surface Preparation by Sequential Atomic Layer Wet Etching and Laser Annealing Treatments

Iwasaki, Akihisa, Akanishi, Yuya, Mazzamuto, Fulvio, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank

Journal:

ECS Transactions

Année:

2017

Langue:

english

Fichier:

PDF, 5.00 MB

english, 2017

28

Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer

Iino, Hideaki, Ogawa, Yuichi, Masaoka, Toru, Le, Quoc Toan, Kesters, Els, Rip, Jens, Oniki, Yusuke, Akanishi, Yuya, Iwasaki, Akihisa, Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2018

Langue:

english

Fichier:

PDF, 1.00 MB

english, 2018

29

Corrosion of Co in BEOL interconnects in dilute HF solution

Akanishi, Yuya, Kesters, Els, Le, Quoc Toan, Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2018

Langue:

english

Fichier:

PDF, 3.24 MB

english, 2018

30

Effect of Cleaning Chemistries on Cobalt: Surface Chemistries and Electrical Characterization

Le, Quoc Toan, Kesters, Els, Akanishi, Yuya, van der Veen, Marleen H., Mizutani, Atsushi, Holsteyns, Frank

Journal:

Solid State Phenomena

Année:

2018

Langue:

english

Fichier:

PDF, 1.18 MB

english, 2018

31

Wet Metal Recess Process for Enabling Scaling Boosters

Akanishi, Yuya, Kesters, Els, Le, Quoc Toan, Pacco, Antoine, Holsteyns, Frank

Journal:

ECS Transactions

Année:

2019

Langue:

english

Fichier:

PDF, 610 KB

english, 2019

32

In-situ electrical and spectroscopical techniques for the study of degradation mechanisms and life time prediction of organic based electronic material systems

Manca, Jean, Goris, Ludwig, Kesters, Els, Lutsen, Laurence, Martens, Tom, Haenen, Ken, Nesladek, Milos, Sanna, Ornella, Vanderzande, Dirk, D'Haen, Jan, Schepper, Luc De

Journal:

MRS Proceedings

Année:

2003

Langue:

english

Fichier:

PDF, 110 KB

english, 2003

33

In-situ electrical and spectroscopical techniques for the study of degradation mechanisms and life time prediction of organic based electronic material systems

Manca, Jean, Goris, Ludwig, Kesters, Els, Lutsen, Laurence, Martens, Tom, Haenen, Ken, Nesladek, Milos, Sanna, Ornella, Vanderzande, Dirk, D'Haen, Jan, Schepper, Luc De

Journal:

MRS Proceedings

Année:

2003

Fichier:

PDF, 110 KB

2003